The Mechanism Design of RYJ-II Hot Embossing Machine for Polymer Micro-Fabrication

Hot-embossing machine RYJ-II was developed for manufacturing polymer micro-fabrication by Micro-system Research Center, Dalian University of Technology, which has larger range of controlled temperature and pressing forces and is applicable to most polymer materials in fabrication of microstructures. Close frame with four columns is adopted and two motors driving screwjack is used to realize rapid positioning and generate pressure individually. Some measures were taken to ensure the two surfaces of the heating plates to be parallel and an airproof chamber which can be used for heat preservation and vacuum realization was provided. The mechanism of the developed machine is studied and the design characteristic is introduced.