A Predictive Control for Electromagnetic Scanning Micro-Mirrors

Electromagnetic MEMS (Micro-Electro-Mechanical System) micro-mirrors is an optical device that integrates the micro-mirrors lens with a micro-electromechanical system driver using optical micro-electromechanical technology. It will be widely used in the field of laser projection and laser radar. However, the serious less damping characteristics and other nonlinearities exist in the MEMS micro-mirrors systems, which leads to oscillation of the MEMS micro-mirrors system. Hence, a predictive control algorithm for the MEMS micro-mirrors system is proposed. The simulation and experimental results show that the performance of proposed algorithm is meaningful.