The Evolution of Ablation Area Induced by Femtosecond Laser

Surface damage morphologies were studied by irradiating with pulses (fluence of 1.13 J/cm2) in succession. Investigation the dependence of the ablation regions on the number of the laser pulses, a silicon(100) plate was irradiated by the femtosecond laser in the range of 50 to 1000 pulse, with the fluence of 1.13J/cm2. The ablation regions had been divided into several parts, which depend on the number of pulses. The formation of columnar structure was discussed also.