电容器
材料科学
电容
电极
电介质
复合数
薄板电阻
原子层沉积
复合材料
薄膜电容器
等效串联电阻
光电子学
图层(电子)
电压
电气工程
化学
物理化学
工程类
作者
Tao Guo,Guozhen Zhang,Heng Zhang,Xi Shen,Xue Chen,Jiaxian Wan,Hao Wu,Chang Liu
标识
DOI:10.1016/j.jallcom.2019.152973
摘要
Transparent and flexible capacitors with composite electrodes consisting of ZnO:Al(AZO) and Cr–Au nanomeshes and dielectric ZrO2 films were directly prepared on plastic substrates. The transparent composite electrodes exhibited an ultralow sheet resistance (5.6 Ω·square−1) and good flexural properties. ZrO2 thin films were grown by atomic layer deposition to serve as dielectric layers. The capacitors showed a higher capacitance density (17.8 fF μm−2) than that capacitors with AZO electrodes (9.8 fF μm−2) while maintained an extra-low leakage current density (1.3 × 10−9 A cm−2 at 1 V). Additionally, the quality factor was increased from 9.6 to 80.5 at a frequency of 1 MHz with the incorporation of Cr–Au nanomeshes, which greatly reduced the power consumptions. More importantly, the capacitors with the composite electrodes exhibited excellent bendability, good cycling stability, and relatively high transparency. It is, therefore, a promising route for application in developing transparent, flexible, high-performance and low-cost integrated circuits.
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