椭圆偏振法
材料科学
电介质
光学
反射率
溅射沉积
光度测定(光学)
入射角(光学)
薄膜
光电子学
溅射
物理
纳米技术
星星
天文
作者
A. Bichri,J. Lafait,H Welsch,M. Abd-Lefdil
标识
DOI:10.1088/0953-8984/9/31/006
摘要
The study of Berreman modes, well known in dielectric layers deposited on metallic substrates, is extended in this paper to metal/dielectric multilayers. Infra-red reflectance measurements were performed from 0.05 eV to 0.24 eV under conditions of non-normal-incidence and polarized light incident on and multilayers prepared respectively by means of magnetron sputtering and thermal evaporation. Optical ellipsometric measurements were performed in the infra-red on the multilayers. In the case of p-polarized light, strong absorptions appear, near the longitudinal optical frequencies of and , characteristic of the Berreman modes. Other structures were observed in the reflectance and in the ellipsometric parameters at the transverse optical frequencies of and . We compare here the results of the two types of optical measurement, and we conclude that photometry and ellipsometry clearly indicate the Berreman modes, ellipsometry giving more information than photometry. We discuss the dependence of these effects on the angle of incidence, the dielectric layer thickness, and the number of periods of the multilayers.
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