Reactions of V2O5, Nb2O5, and Ta2O5 with AlN

Reactions of vanadium, niobium, and tantalum pentoxides with aluminum nitride have been studied using X-ray diffraction. At temperatures from 1000 to 1600°C, we have identified various V, Nb, and Ta nitrides. The composition of the niobium and tantalum nitrides depends on the reaction temperature. The tendency toward nitride formation becomes stronger in the order V 2 O 5 < Ta 2 O 5 < Nb 2 O 5 .