Evaluation of Refractive Index Variations of TiO2:SiO2:Zr Thin Films by Molar Ratio

Zr-doped and undoped TiO2-SiO2 thin lms were fabricated by using sol-gel dip coating.TiO2:SiO2:Zr lms with dierent molar ratio were coated on glass substrates.Refractive indexes and the thicknesses of thin lms were measured with Metricon 2010 Prism Coupler.The theoretical and measured refractive indexes of thin lms were found to be consistently changing with molar ratio.The measured refractive indexes of thin lms were lower than the theoretical ones due to the porosity of the structure.