Silicon-Compatible Semiconductor Gas Sensors

The growing demand for intelligent environmental monitoring is driving the advancement of high-performance, low-cost, and highly integrated gas sensors. Silicon-compatible semiconductor gas sensors provide a promising platform to achieve this goal by leveraging their compatibility with complementary metal–oxide semiconductor (CMOS) processes. The established mass-manufacturing capabilities of micro-electromechanical systems (MEMS) and the high sensitivity and signal amplification characteristics of field effect transistors (FETs) in recent years have made the development of next-generation sensing devices feasible. In this review, we systematically summarize the latest advances in silicon-compatible gas sensors, with a focus on MEMS and FET technologies. We discuss their sensing mechanisms and performance optimization strategies, and further highlight the evolution of gas sensor technology toward on-chip intelligent olfactory systems that integrate sensing, computing, and storage capabilities.