The Evolution and Integrated Systems of Microbatteries

ABSTRACT Advances in microbatteries (MBs) technology drive miniaturization and on‐chip integration, embedding energy storage directly within semiconductor substrates to deliver compact power solutions for portable electronics. This progress meets growing demands across applications such as Internet of Things (IoT) sensors and wearable devices. However, MBs remain in an early developmental stage compared to commercial lithium‐ion batteries, requiring breakthroughs in materials science, manufacturing methods, and structural engineering to improve performance. A comprehensive understanding of these aspects is critical for advancing the field. This review meticulously examines the historical evolution of MBs technologies, emphasizing pivotal advancements in nanostructured systems, particularly focusing on thin‐film architectures and self‐aligned nanowire growth techniques. Furthermore, the review delves into the integration of artificial intelligence (AI) within the realm of MBs, alongside exploring advanced fabrication techniques and optimization strategies. Subsequently, we conduct a systematic analysis of several specific application scenarios. Based on the extant developmental status, this paper proposes prospective research avenues, with particular emphasis on high‐density integrated arrays and flexible MBs, thereby providing strategic guidance for further augmenting MBs performance. The key challenges and technical pathways are elucidated, deepening understanding of current paradigms while establishing a foundation for future innovations.