3D Holographic Volumetric Multi‐Foci Array for Two‐Photon Lithography

ABSTRACT Conventional iterative algorithms based on 2D Fourier transform, such as Gerchberg‐Saxton, are typically employed to generate customizable 2D light field distributions in the focal plane through holographic phase modulation, enabling efficient two‐photon polymerization processing. However, extending this approach to achieve true 3D light field configurations necessitates the superposition of spherical wavefront phases or the use of 2D FT, which introduces critical limitations (e.g., low overall consistency and interlayer crosstalk). These inherent constraints fundamentally compromise the precision and reproducibility of TPP microfabrication. To overcome these challenges, we propose a 3D holographic algorithm with experimentally validated capabilities for volumetric light‐field modulation, achieving consistency exceeding 90% across all spatial dimensions. The impacts of k ‐domain sampling and iterative weighting on light field consistency are systematically analyzed, and modulation consistency is optimized through selective sampling and intensity compensation. This work demonstrates the first implementation of 3D multi‐foci in TPP processing, simultaneously achieving true volumetric parallelization beyond 2D planar constraints. As a proof‐of‐concept demonstration, 3D spiral array structures are fabricated rapidly and their circular dichroism responses are verified. Our method establishes a pioneering framework for next‐generation rapid micro/nanofabrication through volumetric light field manipulation.