NMOS逻辑
微电子
静电放电
电气工程
硅
电压
整流器(神经网络)
材料科学
低压
击穿电压
电子线路
阴极
光电子学
功率(物理)
电子工程
工程类
计算机科学
晶体管
物理
随机神经网络
量子力学
机器学习
循环神经网络
人工神经网络
作者
Jiarui Li,Shulong Wang,Yuhang Li,Jinbin Pan,Lan Ma,Yang Zhao,Chaoyong Mi
标识
DOI:10.1109/icpics55264.2022.9873762
摘要
With the advancement of microelectronics technology, the resistance of the device itself to ESD (Electrostatic Discharge) is constantly weakened, so the study of ESD is of great significance. SCR (Silicon Controlled Rectifier) has the advantages of low on-resistance and strong protection ability, but its disadvantage is that the holding voltage is low and the trigger voltage is high. This paper deals with a new type of SCR, which is based on MLSCR (Modified Lateral SCR), with an NMOS embedded in the cathode and a shallow well embedded under the N-well and P-well (SP-SN-SCR). The new structure is modeled in sentaurus TCAD and tested in simulation. The test results show that, compared with the traditional structure, the holding voltage of the SP-SN-SCR is 4.9 V, the turn-on voltage is 5.8 V, and the secondary breakdown current is also large.
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