Deposition of molybdenum thin films by an alternate supply of MoCl5 and Zn

Molybdenum thin films were deposited onto both soda lime glass and Al2O3 film by an alternate supply of MoCl5 and Zn. Zinc was used as a reducing agent. The film growth was performed over a temperature range of 400–500 °C in order to study the temperature effect on the growth. In addition to the growth temperature, the purge length after zinc was also seen to have a considerable effect on the growth. The films were analyzed by energy dispersive x-ray spectroscopy, scanning electron microscopy, elastic recoil detection analysis, x-ray diffraction and four point resistance measurements in order to determine their chemical and physical characteristics.