Hydrogen Source And Purification in Polysilicon Production

This paper describes several sources of hydrogen in the polysilicon production process,and compared the technology,economics that recovery of hydrogen as a polysilicon production supplemental source by electrolysis,cracking or industrial exhaust gas purification.Proposed a new method using a specific adsorbent,the pressure swing adsorption purification and recovery can be repeated using hydrogen.Comparing several hydrogen purification and recovery technology advantage,the hydrogen purification by pressure swing adsorption(PSA) process is optimal,the lowest energy consumption,the best economic benefits.