STUDY ON STRUCTURE AND ELECTROCHROMIC PERFORMANCES OF WO_x∶Mo FILMS

Using pure tungsten and molybdenum as targets, WOx films doped with Mo were deposited on ITO glass substrates by reactive magnetron sputtering. The electrochromic performances and structure of the films were analyzed by XRD and transmittance spectrum of the films, and the influence mechanism of Mo-doping on WOx films' electrochromic performances and structure were studied. The experimental results show that in a certain doping range, WOx films with Mo-doping would improve the electrochromic performances, and the more even the doping is, the better the electrochromic performances of the film are. The corresponding doping quantity which influence electrochromic performances are denoted roughly by sputtering time,and the preferential relative doping-value is 7.7%, around which the electrochromic performances can be improved greatly. According the tendency of experiment results, an effective range of relative doping quantity would be existent, beyond which the doping will be ineffective. The XRD shows that the doped WOx film with Mo is still amorphous, and tends to be stronger.