Compensation Method of Temperature Drift in Pressure Sensor Using Double Wheatstone-Bridge Method

This paper deals with the effect of temperature upon the output sensitivity of the piezoresistive pressure sensor. In order to reduce the temperature drift of the piezoresistive pressure sensor output, the Double Wheatstone Bridge Method is used to test the sensor with the temperature controlled at the range of 300～373 K. The results indicate that the temperature drift of the sensor output can be lowered over 70%.