飞秒
微加工
光子学
材料科学
制作
激光器
光子集成电路
光电子学
表面微加工
波导管
快速成型
光学
电介质
微音学
纳米技术
硅光子学
缝隙波导
物理
医学
替代医学
病理
复合材料
作者
Yuechen Jia,Shixiang Wang,Feng Chen
标识
DOI:10.29026/oea.2020.190042
摘要
Optical waveguides are far more than mere connecting elements in integrated optical systems and circuits. Benefiting from their high optical confinement and miniaturized footprints, waveguide structures established based on crystalline materials, particularly, are opening exciting possibilities and opportunities in photonic chips by facilitating their on-chip integration with different functionalities and highly compact photonic circuits. Femtosecond-laser-direct writing (FsLDW), as a true three-dimensional (3D) micromachining and microfabrication technology, allows rapid prototyping of on-demand waveguide geometries inside transparent materials via localized material modification. The success of FsLDW lies not only in its unsurpassed aptitude for realizing 3D devices but also in its remarkable material-independence that enables cross-platform solutions. This review emphasizes FsLDW fabrication of waveguide structures with 3D layouts in dielectric crystals. Their functionalities as passive and active photonic devices are also demonstrated and discussed.
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