A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

This letter presents a high performance rate-integrating honeycomb disk resonator gyroscope (HDRG). High Q factor resonator and symmetric vibration detection gain are the key to high performance rate-integrating gyroscope. By stiffness-mass decoupling design, HDRG can achieve high Q factor of about 600k and decay time of over 44s. A compensation method is applied to suppress the rate-dependent angular drift caused by the asymmetry circular distribution of detection gains. Finally, the rate-integrating HDRG shows an excellent bias instability of 0.038°/h, 1.05ppm scale factor nonlinearity, wide measurement range of over ±7000°/s and a threshold value of about ±0.0001°/s, which is the best performance in the reported rate-integrating MEMS gyroscopes.