溅射沉积
材料科学
光电子学
溅射
腔磁控管
化学
薄膜
纳米技术
作者
М. А. Абдуллаев,А. К. Ахмедов,D. Kh. Magomedova,P. P. Khokhlachev
标识
DOI:10.1134/s0020168512090014
摘要
n-Type AgInSe2 films 0.5 to 0.9 μm thick were grown by dc magnetron sputtering. As targets, we used AgInSe2 crystals grown by a modified Bridgman process using high-purity precursors. The crystal structure, morphology, electrical conductivity, and Hall coefficient of the films were studied at various temperatures. We determined the optimal growth and annealing temperatures of the films (500 and 250°C, respectively). Using structures based on the films, we obtained the spectral dependences of their photoresponse, established the nature of interband transitions in the films, and evaluated their band gap. The ability to vary electrical and optical properties with no changes in stoichiometry is of interest for concentrated solar power applications.
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