暗场显微术
共焦
对比度(视觉)
光学
扫描共焦电子显微镜
扫描电子显微镜
共焦显微镜
领域(数学)
光学(聚焦)
显微镜
材料科学
物理
数学
纯数学
作者
Kazutaka Mitsuishi,Ayako Hashimoto,Masaki Takeguchi,Makoto Shimojo,Kazuo Ishizuka
标识
DOI:10.1016/j.ultramic.2010.08.004
摘要
Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.
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