High-Responsivity Flexible InGaN/GaN MQWs Nanomembrane Photodetectors With DBR Mirror Toward Visible Light Communication

Flexible InGaN-based photodetectors have broad application prospects in wearable biometric monitoring and visible light communication (VLC). However, flexible InGaN-based visible light photodetectors (VLPDs) still face challenges of low responsivity due to poor material quality and low light absorption efficiency. This work demonstrates a high-performance flexible VLPD integrating a TiO2/SiO2 distributed Bragg reflector (DBR) mirror with an InGaN/GaN MQWs nanomembrane. The optical field density is significantly enhanced by introducing the DBR mirror, resulting in a 22% improvement in PD’s responsivity (68.6 mA/W@-1 V). The photoresponse time ( $\text {T} _{\text {r}}$ / $\text {T} _{\text {f}}\text {)}$ of PD are $24.4~\mu $ s and $6.1~\mu $ s, respectively. The −3 dB bandwidth of PD is 106.2 kHz. The flexible PD exhibits good stability over multiple bending cycles and long periods in the air. A real-time and precise VLC system link has been established based on high-performance flexible PDs, achieving a data rate of 9 Kbps. This research offers a strategic approach for designing high-performance flexible VLPDs towards VLC.