总谐波失真
话筒
灵敏度(控制系统)
微电子机械系统
材料科学
悬臂梁
压电
声学
光电子学
分析化学(期刊)
电子工程
电气工程
声压
物理
复合材料
工程类
化学
色谱法
电压
作者
Bohao Hu,Wenjuan Liu,Chaoxiang Yang,Lingeng Lu,Zekai Wang,Yan Liu,Yao Cai,Jian Wang,Shishang Guo,Chengliang Sun
出处
期刊:Journal of microelectromechanical systems
[Institute of Electrical and Electronics Engineers]
日期:2023-12-01
卷期号:32 (6): 638-644
被引量:1
标识
DOI:10.1109/jmems.2023.3317858
摘要
With increasing requirements for massive sound acquisition, piezoelectric MEMS microphones (PMMs) have attracted widespread attention due to the advantages of low power consumption, fast response, waterproof and dustproof. This work presents a PMM with sector-connected cantilevers, where the anchors are located at the center of a circular operating area of 0.5-mm $^{2}$ . According to theoretical analysis and finite element simulations, the proposed PMM exhibits higher sensitivity compared with conventional cantilever diaphragms fixed at the perimeter. The PMM is fabricated on a customized cavity silicon-on-insulator (CSOI) substrate with a 9.5% scandium-doped aluminum nitride (ScAlN) film. The output of the PMM assembly is amplified and filtered from 100-Hz to 20-kHz, and the measured sensitivity, minimum detectable pressure (MDP), resolution, total harmonic distortion (THD), and signal-to-noise ratio (SNR) are $-$ 37.6-dB (re: 1-V/Pa), 40-dB SPL, 40-dB SPL, 0.997%, and 54.2-dB at 1-kHz, respectively. The calculated nonlinearity of the PMM is less than 0.85% under 94-dB SPL. The receiving sensitivity and SNR of the ScAlN-based PMM are effectively improved, which shows great potential in intelligent voice acquisition and control scenarios. 2023-0110
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