A minireview on chemical vapor deposition growth of wafer-scale monolayer h-BN single crystals

材料科学 氮化硼 化学气相沉积 Crystal(编程语言) 单晶 薄脆饼 纳米技术 基质(水族馆) 工程物理 化学 结晶学 计算机科学 工程类 地质学 程序设计语言 海洋学
作者
Lin Li,Ye Zhang,Ruijie Zhang,Zhongyuan Han,Huanli Dong,Gui Yu,Dechao Geng,Hui Ying Yang
出处
期刊:Nanoscale [Royal Society of Chemistry]
卷期号:13 (41): 17310-17317 被引量:17
标识
DOI:10.1039/d1nr04034k
摘要

Hexagonal boron nitride (h-BN), with its excellent stability, flat surface, and large bandgap, plays a role in a variety of fundamental science and technology fields. The past few years have witnessed significant development in the scaled growth of h-BN single crystals. Currently, the size of h-BN crystal can be reached up to wafer-scale, paving the way towards industrial production and commercial applications. In this minireview, recent academic breakthroughs regarding the controlled growth of large-sized h-BN single crystals via chemical vapor deposition (CVD) are presented. The as-developed technique in terms of growth parameters, choice of catalysts, and the mechanism is fully emphasized, offering a guideline in enhancing the size and quality of h-BN. Several typical metal catalysts have been used in shaping scaled h-BN single crystals, of which the metal Cu substrate has drawn the most intensive attention. The significant advances in expanding the size of h-BN single crystals will largely push forward the way to h-BN industrialization and commercialization. The past few years have witnessed significant development in the scaled growth of h-BN single crystals. Currently, the size of h-BN crystal can be reached up to wafer-scale, paving the way towards industrial production and commercial applications. In this minireview, recent academic breakthroughs regarding controlled growth of large-sized h-BN single crystals via chemical vapor deposition (CVD) are present. The as-developed technique in terms of growth parameters, choice of catalysts and mechanism is fully emphasized, offering a guideline in enhancing size and quality of h-BN. Several typical metal catalysts are exhibited in shaping scaled h-BN single crystals, of which the metal Cu substrate has drawn the most intensive attentions.
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