1913 Development of Microactuators Utilizing Ti-Ni-Cu SMA Thin Film

Static and dynamic actuation properties of the high-speed microactuator utilizing the Ti-Ni-Cu shape memory alloy (SMA) thin film which has a narrow transformation temperature hysteresis were investigated. Transformation temperature hysteresis of the microactuator utilizing the Ti-Ni-Cu thin film was 8K which is one-third of that of the microactuator utilizing the Ti-Ni thin film. Displacement of the microactuator utilizing the Ti-Ni thin film remarkably decreased when working frequency reached at 50Hz. On the other hand, decrease in displacement was not observed until 60Hz of working frequency for the microactuator utilizing the Ti-Ni-Cu thin film. Moreover, the microactuator utilizing the Ti-Ni-Cu thin film worked efficiently at a working frequency of 100Hz..