ZnO semiconductor for applications in optoelectronics sensors structures

The paper presents numerical analysis of integrated optics structure in the form of planar waveguide based on polymer material (SU-8) with additional cover layer based on wide band gap oxide semiconductor – zinc oxide (ZnO). The theoretical studies of integrated optics structure presented in the paper was focused on determination of waveguide properties such as: modal field distribution and effective refractive index N_eff as a function of optical and geometrical properties of waveguide and cover layer. The theoretical studies presented in the paper was carried out for two type of planar waveguide structure: without additional cover layer and with additional cover layer based on ZnO. The second part of the paper presents experimental results focused on technology of a single mode planar waveguide based on SU-8 polymer.