纤锌矿晶体结构
材料科学
铁电性
外延
旋节分解
纳米尺度
相界
薄膜
结晶学
凝聚态物理
化学物理
相(物质)
纳米技术
光电子学
锌
化学
冶金
电介质
图层(电子)
有机化学
物理
作者
Xiaoman Zhang,Eric A Stach,Wen Jin Meng,Andrew Chengsi Meng
出处
期刊:Nanoscale horizons
[The Royal Society of Chemistry]
日期:2023-01-01
卷期号:8 (5): 674-684
摘要
We report the growth of epitaxial wurtzite AlScN thin films on Si (111) substrates with a wide range of Sc concentrations using ultra-high vacuum reactive sputtering. Sc alloying in AlN enhances piezoelectricity and induces ferroelectricity, and epitaxial thin films facilitate systematic structure-based investigations of this important and emerging class of materials. Two main effects are observed as a function of increasing Sc concentration. First, increasing crystalline disorder is observed together with a structural transition from wurtzite to rocksalt at ∼30 at% Sc. Second, nanoscale compositional segregation consistent with spinodal decomposition occurs at intermediate compositions, before the wurtzite to rocksalt phase boundary is reached. Lamellar features arising from composition fluctuations are correlated with polarization domains in AlScN, suggesting that composition segregation can influence ferroelectric properties. The present results provide a route to the creation of single crystal AlScN films on Si (111), as well as a means for self-assembled composition modulation.
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