Rotary–Linear Type Piezoelectric Actuator Based on Double-Elliptical Stator

This paper introduces a novel piezoelectric actuator designed for precise linear and rotational movements of a cylindrical slider-rotor. The actuator’s design features two elliptical frames interconnected by two plates, with a cylindrical contact situated on the top of the upper plate to facilitate the motion or rotation of the slider. Two piezoelectric multilayer transducers are housed within each elliptical frame and are used to excite vibrations of the elliptical frames using two harmonic signals with a phase difference of π/2 and varying excitation schemes. This excitation pattern generates elliptical motion trajectories of the contact in two orthogonal planes, enabling both linear and rotational displacements of the slider-rotor. Numerical and experimental investigations were conducted to validate the performance and accuracy of the actuator. Additionally, harmonic response and transient analysis were performed to investigate elliptical motion trajectories of the contact in perpendicular planes under various excitation schemes and frequencies. The results confirm that the rotational and linear motions of the slider-rotor can be independently controlled. The actuator achieved a maximum rotational speed of 163.1 RPM and a maximum linear speed of 41.4 mm/s, with a corresponding peak output torque and force of 236.1 mN·mm and 368.1 mN, respectively. A resolution measurements showed that the actuator can achieve an angular resolution of 1.02 mrad and a linear resolution of 53.8 µm.