The physical and electrochromic properties of WO 3 thin films on different glass and plastic substrate have been contrasted and analyzed. WO 3 thin films were prepared by vacuum electron beam evaporation low voltage reactive ion plating technology. The physical properties of WO 3 thin films were tested by scanning electron microscope?X ray diffraction and electron prober microanalysis measurements respectively. Optical spectrum characters of WO 3 thin films were tested in three electrode cell.