Laser power characterization method for fabrication of centrosymmetric CR-DOEs mask by polar laser direct writing
作者
Ziyu Ye
摘要
The technology for fabricating CR-DOE by laser direct writing method has advantages of simple process,time saving and low cost.The charactering method of laser power is studied.The theory of fabricating of CR-DOE by laser direct writing method is described.The relations between microstructure depth and laser power,exposing position radius and laser power are studied.The results show that both microstructure depth and exposing position radius change in direct ratio to laser power.The charactering method is given and the mask of a kind of centrosymmetric continuous relief diffractive focus lens is fabricated by the method.