位错
热导率
材料科学
氮化镓
凝聚态物理
氮化物
宽禁带半导体
镓
复合材料
光电子学
冶金
物理
图层(电子)
作者
C. Mion,John F. Muth,Edward A. Preble,Drew Hanser
摘要
The authors experimentally find that the thermal conductivity of gallium nitride depends critically on dislocation density using the 3-omega technique. For GaN with dislocation densities lower than 106cm−2, the thermal conductivity is independent with dislocation density. The thermal conductivity decreases with a logarithmic dependence for material with dislocation densities in the range of 107–1010cm−2. These results are in agreement with theoretical predictions. This study indicates that the hydride vapor phase epitaxy method offers an attractive route for the formation of semi-insulating gallium nitride with optimal thermal conductivity values around 230W∕mK and very low dislocation density near 5×104cm−2.
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