Excimer Lasers For Material Processing: Results And Industrial Applications

Excimer laser material processing of technical parts leads to results which, in many cases, differ strongly from previously known effects. This paper is a review on processing of metals, plastics, glass, ceramics, and compound materials. Since the effect of radiation is determined by beam parameters, beam handling will be described as well. Starting with the beam properties of interest, the technique and results of excimer laser processing will be summarized.