微观结构
多孔性
电介质
材料科学
离子
反应离子刻蚀
蚀刻(微加工)
等离子体
化学成分
化学工程
等离子体刻蚀
分析化学(期刊)
矿物学
化学
纳米技术
复合材料
环境化学
光电子学
有机化学
图层(电子)
工程类
物理
量子力学
作者
Matthieu Lépinay,Daniel J. Lee,Riccardo Scarazzini,Michel Bardet,Marc Veillerot,Lucile Broussous,Christophe Licitra,Vincent Jousseaume,François Bertin,Vincent Rouessac,André Ayral
标识
DOI:10.1016/j.micromeso.2016.04.004
摘要
Abstract The impact of plasma reactive ion etching on hybrid organic/inorganic polymer materials is investigated in detail regarding chemical (composition) and physical (porosity) aspects. Porous low dielectric constant insulating films are used in integrated circuits and these experience plasma etching before the deposition of conductive copper lines. We show that this induces detrimental changes in the film. Notably, chemical composition modifications were characterized by Attenuated Total Reflectance Fourier Transform Infrared spectroscopy (ATR-FTIR) and depth-profiled by Time-of-Flight Secondary Ion Mass Spectroscopy (ToF-SIMS), whereas fine structural changes were analyzed with 1 H, 13 C, and 29 Si solid-state Nuclear Magnetic Resonance (ssNMR). Evolution of surface properties was measured with Contact Angle (CA) analysis, while porosity variations were probed with Ellipsometric Porosimetry (EP). We show how the complementarity of these techniques enables a thorough description of the impact of the etching process on this low-dielectric constant material, which in turn enables recommendations for the manufacture of microelectronic devices.
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