Design of an Ultra Low-Power Glass-Based Micro-Hotplate with Thermal Isolation Structure

The development and optimization of micro-hotplates play a critical role in the advancement of thermal emitter, gas sensors and other micro-electro-mechanical systems. This study explores the thermal performance of a novel micro-hotplates based on glass substrate with enhanced thermal efficiency by thermal isolation gaps integration. It significantly reduces power consumption and enhances temperature uniformity. The power consumption is only 11.7 mW at 300°C with a huge decrease of 30.2 % compared to the device without thermal isolation gaps while the heating area is 340 $\times 340\mu \mathrm{m}^{2}$. And the temperature variation within the effective heating area is only 0.18 °C $/\mu \mathrm{m}$. Furthermore, the mechanical stability of the micro-hotplates is maintained, making it a promising candidate for low-power, high-efficiency MEMS applications.