生物传感器
材料科学
场效应晶体管
纳米片
德拜长度
纳米技术
光电子学
硅
检出限
电磁屏蔽
灵敏度(控制系统)
生物分子
晶体管
电子工程
化学
电气工程
离子
工程类
有机化学
电压
复合材料
色谱法
作者
Yinglu Li,Shuhua Wei,Enyi Xiong,Jiawei Hu,Xufang Zhang,Yanrong Wang,Jing Zhang,Yan Jiang,Zhaohao Zhang,Huaxiang Yin,Qingzhu Zhang
出处
期刊:Biosensors
[Multidisciplinary Digital Publishing Institute]
日期:2024-03-14
卷期号:14 (3): 144-144
被引量:3
摘要
Silicon nanowire field effect (SiNW-FET) biosensors have been successfully used in the detection of nucleic acids, proteins and other molecules owing to their advantages of ultra-high sensitivity, high specificity, and label-free and immediate response. However, the presence of the Debye shielding effect in semiconductor devices severely reduces their detection sensitivity. In this paper, a three-dimensional stacked silicon nanosheet FET (3D-SiNS-FET) biosensor was studied for the high-sensitivity detection of nucleic acids. Based on the mainstream Gate-All-Around (GAA) fenestration process, a three-dimensional stacked structure with an 8 nm cavity spacing was designed and prepared, allowing modification of probe molecules within the stacked cavities. Furthermore, the advantage of the three-dimensional space can realize the upper and lower complementary detection, which can overcome the Debye shielding effect and realize high-sensitivity Point of Care Testing (POCT) at high ionic strength. The experimental results show that the minimum detection limit for 12-base DNA (4 nM) at 1 × PBS is less than 10 zM, and at a high concentration of 1 µM DNA, the sensitivity of the 3D-SiNS-FET is approximately 10 times higher than that of the planar devices. This indicates that our device provides distinct advantages for detection, showing promise for future biosensor applications in clinical settings.
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