A Strain‐Temperature Integrated Polymer‐Derived SiCN Ceramic High Temperature Sensor with Wide‐Range and Ultra‐Short Response Time

Abstract Fabricating strain sensors with high response in a wide temperature and strain range is still a challenge, especially in high temperature harsh environments. Herein, a dual‐functional sensor with cantilever beam structure is fabricated using polymer‐derived SiCN ceramics, which can be applied for temperature and stain monitor. The performance of the integrated sensor is evaluated from room temperature to 1000 °C and the related sensing mechanism is analyzed. The prepared strain sensor has ultrafast response of 60 ms in the strain range of 0–3500 µε and the maximum strain rate can reach 46 200 µε s −1 . Moreover, the sensor has excellent stability and ultra‐high sensitivity under high temperature environments. Additionally, the temperature can be detected separately up to 1000 °C without any disturbance. This attractive integration sensor with competitive sensitivity, excellent stability, ultrafast response speed, and broad range, has great potential to detect temperature and strain signals for practical application in high temperature extreme environments.