Polarization-independent 2×2 high diffraction efficiency beam splitter based on two-dimensional grating

Better performances of two-dimensional (2D) grating are required recently, such as polarization independence, high efficiency, wide bandwidth and so forth. In this paper, we propose a 2×2 2D silver cylindrical array grating with excellent polarization-independent high diffraction efficiency (DE) over communication band for beam splitting. The grating was calculated by rigorous coupled wave analysis (RCWA) and can achieve over 24% DE of four first diffraction orders at 1550 nm with nonuniformity of 1.43% in both transverse electric (TE) and transverse magnetic (TM) polarizations, which is a significant improvement over previous reports. The holographic exposure technology, wet chemical development process and electron beam evaporation were used to fabricate the 2D grating. The correctness and accuracy of the calculation are fully verified with the measurement result of fabricated grating. Excellent performances of the 2D splitter we proposed will have great potential for applications in optical communication, semiconductor manufacturing and displacement measurement.