Flexible microelectrode array for retinal prosthesis

fMEA (flexible microelectrode array) is one of the key implantable components for neural stimulating and recording. For its specific implanted environment, it should be designed and fabricated to meet following requirements such as biocompatibility, high-resolution, flexible and low impedance to ensure safety and long-term effective stimulation. Here we proposed a high resolution (1025-channel) fMEA for artificial retina. The adhesion between its substrate polyimide (PI) and metal was enhanced by using plasma treatment. The stimulation spots were electroplated with Pt-gray, which significantly reduced the electrochemical impedance from 110 kμ to 16 kμ at 1 kHz, and also provided larger charge storage capacity up to 83.2 mC/cm². It shows a promising application for neural stimulation and recording.