微系统
材料科学
微流控
纳米技术
微电子
膜
聚酰亚胺
同轴
光电子学
质子输运
功率(物理)
可扩展性
集成电路
电子工程
微电极
功率密度
流体学
实验室晶片
电气工程
微加工
质子交换膜燃料电池
作者
Aleksandr I. Egunov,Hongmei Tang,Pablo E. Saenz,Dmitriy D. Karnaushenko,Yumin Luo,Chao Zhong,Xinyu Wang,Yang Huang,Pavel Fedorov,Leandro Merces,Minshen Zhu,Daniil Karnaushenko,Oliver G. Schmidt
标识
DOI:10.1007/s40820-026-02188-7
摘要
Thin-film self-assembly of three-dimensional (3D) microsystems presents a compelling route to integrate complex functionalities into ultra-compact volumes; yet, strategies for incorporating tunable ion-conducting elements remain limited. Here, we introduce a strain-induced self-assembly platform that transforms lithographically patterned multilayer thin films into functional 3D coaxial Swiss-roll microtubes with total active volumes below 1 µL. A key innovation is the monolithic integration of a chemically tunable polyimide proton exchange membrane, enabling post-fabrication optimization of ionic transport that balances proton transport with mediator blocking. We further implement a dual-mode operational scheme that decouples microbial metabolism from electrochemical power generation, revealing biofouling, not chemical fouling or membrane degradation, as the dominant failure mechanism in conventional architectures. Critically, optimally treated polyimide membranes exhibit excellent recoverability after fouling, while cell-free mode operation maintains stable performance by physically excluding microorganisms from the microelectronic environment. This integrated bio-electronic microsystem achieves a volumetric power density of ~ 3.1 mW cm⁻3 within an ultra-compact footprint of 4.16 mm2. Our work establishes a scalable thin-film engineering approach to create tunable, 3D bioelectronic power sources for autonomous microsystems.
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