相对湿度
湿度
材料科学
分析化学(期刊)
化学
物理
有机化学
热力学
作者
Fubo Gu,Dan Wang,Jingfeng Wang,Puhong Wang,Dongmei Han,Zhihua Wang,Zhihong Qiao,Yunli Hu
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2022-08-01
卷期号:22 (15): 14753-14761
被引量:5
标识
DOI:10.1109/jsen.2022.3187222
摘要
Metal oxide semiconductor (MOS) gas sensor is an effective tool for NO 2 detection. However, their performance is seriously influenced by humidity due to water vapor poisoning, and it remains a challenge to develop an anti-humidity NO 2 MOS sensor. In this work, a humidity-independent, highly sensitive and selective NO 2 sensor based on In 2 O 3 nanoflowers decorated with graphite nanoflakes was fabricated, which exhibited excellent anti-humidity and stability (response fluctuation within 7%) in a wide relative humidity (RH) range of 20% - 90%. The fabricated sensor had a high response of 10 to ppb level NO 2 (RH 80%). Besides, the sensor exhibited good selectivity, low operating temperature (75 °C) and rapid response speed (50 s to 5 ppm NO 2 ). The reason for the excellent anti-humidity function was investigated. Large amounts of polar groups were formed on the graphite nanoflakes after hydrothermal treatment, which enhanced the interaction between the graphite and In 2 O 3 and made the surface of the composites have a strong water absorption function. Moreover, the intrinsic hydrophobic property of the graphite can effectively block the interference of water vapor to the moisture-sensitive In 2 O 3 . Our work provides a new idea for enhancing the anti-humidity performance of the MOS sensors and can broaden their applications in a variety of complex environments.
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