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Humidity-Independent, Highly Sensitive and Selective NO2 Sensor Based on In2O3 Nanoflowers Decorated With Graphite Nanoflakes

相对湿度 湿度 材料科学 分析化学(期刊) 化学 物理 有机化学 热力学
作者
Fubo Gu,Dan Wang,Jingfeng Wang,Puhong Wang,Dongmei Han,Zhihua Wang,Zhihong Qiao,Yunli Hu
出处
期刊:IEEE Sensors Journal [Institute of Electrical and Electronics Engineers]
卷期号:22 (15): 14753-14761 被引量:9
标识
DOI:10.1109/jsen.2022.3187222
摘要

Metal oxide semiconductor (MOS) gas sensor is an effective tool for NO 2 detection. However, their performance is seriously influenced by humidity due to water vapor poisoning, and it remains a challenge to develop an anti-humidity NO 2 MOS sensor. In this work, a humidity-independent, highly sensitive and selective NO 2 sensor based on In 2 O 3 nanoflowers decorated with graphite nanoflakes was fabricated, which exhibited excellent anti-humidity and stability (response fluctuation within 7%) in a wide relative humidity (RH) range of 20% - 90%. The fabricated sensor had a high response of 10 to ppb level NO 2 (RH 80%). Besides, the sensor exhibited good selectivity, low operating temperature (75 °C) and rapid response speed (50 s to 5 ppm NO 2 ). The reason for the excellent anti-humidity function was investigated. Large amounts of polar groups were formed on the graphite nanoflakes after hydrothermal treatment, which enhanced the interaction between the graphite and In 2 O 3 and made the surface of the composites have a strong water absorption function. Moreover, the intrinsic hydrophobic property of the graphite can effectively block the interference of water vapor to the moisture-sensitive In 2 O 3 . Our work provides a new idea for enhancing the anti-humidity performance of the MOS sensors and can broaden their applications in a variety of complex environments.
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