温度控制
控制器(灌溉)
功率(物理)
半导体
汽车工程
工程类
功率消耗
温度测量
电子工程
控制理论(社会学)
电气工程
计算机科学
控制(管理)
控制工程
农学
物理
量子力学
人工智能
生物
作者
Wataru Ohnishi,Akira Hirata,Ryosuke Shibatsuji,Tatsuya Yamaguchi
出处
期刊:IEEE Transactions on Semiconductor Manufacturing
[Institute of Electrical and Electronics Engineers]
日期:2023-05-01
卷期号:36 (2): 197-204
被引量:1
标识
DOI:10.1109/tsm.2023.3235492
摘要
Semiconductor vertical furnaces must achieve even faster and more precise temperature control due to the demand for ever-reducing the minimum feature size or critical dimension in semiconductor chips. Also, the insulation performance of vertical furnaces has improved to reduce power consumption; as a side effect, temperature reduction operation takes longer without active cooling. Therefore, in addition to heaters, vertical furnaces equipped with coolers have emerged to achieve higher productivity, more precise temperature control, and lower power consumption. However, the inability to generate positive and negative control inputs for one of the heaters or coolers poses a challenge for an intuitive controller parameter design. The aim of this paper is to address these issues by proposing an intuitive method for designing a controller in the frequency domain which virtually integrates heaters and coolers. We implemented the controller in a full-scale actual semiconductor vertical furnace and first confirmed that the linearity is high. Furthermore, we experimentally verified that the controller achieves both high-speed, high-precision temperature control and low power consumption.
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