光学
材料科学
栅栏
显微镜
扫描电子显微镜
衍射光栅
光学显微镜
物理
作者
Yanwei Fu,Wanzhuo Ma,Xinyu Wang,Xianzhu Liu,Zonghui Tao,Huilin Jiang
出处
期刊:Applied Optics
[Optica Publishing Group]
日期:2022-12-20
卷期号:62 (3): 552-552
被引量:3
摘要
We report the concept of a 1550 nm laser line scanning microscope based on a polydimethylsiloxane (PDMS) grating with scanning by stretching the PDMS grating to improve the scanning speed and enable low-cost scanning. Zemax is used to verify the possibility of realizing the system by simulating the illumination light path and the emission light path. The scanning field of view is 0.11 m m × 0.11 m m , and the modulation transfer function (MTF) data of the 0th, ± 1 st, and ± 2 nd diffraction orders in the illumination light path and the emission light path, respectively, meet the requirements of the diffraction limit resolution at the cutoff frequencies.
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