Process Planning and Tool Design of Magnetorehological Jet Finishing

Magnetorehological jet finishing (MJF) for optical materials is a promising technique, which characterized as polishing arbitrary surface patterns and correction plates, micro-channels, thin ultra-uniform thickness substrates and near perfect optical components. The process and the machine are complicated. This paper is concerned with the process optimization and tool design, and results obtained by FEA on the designed MJF tool.