Optimum heat treatment condition for PZT thin films prepared by Sol-Gel

Abstract The effects of pyrolysis and annealing conditions on the orientation of PZT thin films prepared by Sol-Gel process have been investigated. The influence of the interface behaves between Ti and Pt formed at different heat treatment conditions on orientation of final PZT thin films was emphasized in this paper. The relationship between thermal treatment and orientation in PZT thin films fabricated by the technique was set up, and the optimum thermal process was determined. PZT films on the (111)Pt/Ti/SiO2/Si using such process exhibited good ferroelectric properties.