G060014 Removal of Oxide Layer Using Vacuum Arc for Metal Plate Opposite Side to Anode Surface

Vacuum Arc cleaning to remove oxide layer on metal plate opposite side to anode was demonstrated. It was confirmed that cathode spots could exist on the opposite side and removed the oxide layer as well as the case on the anode side. The cathode spot behavior and the removal characteristics of oxide layer were investigated, and some charges caused by different experimental conditions were revealed.