Etching Dynamics of Geometrically Confined Silicon Nanostructure

Journal Article Etching Dynamics of Geometrically Confined Silicon Nanostructure Get access Kunmo Koo, Kunmo Koo Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea Search for other works by this author on: Oxford Academic Google Scholar Joon Ha Chang, Joon Ha Chang Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea Search for other works by this author on: Oxford Academic Google Scholar Sanghyeon Ji, Sanghyeon Ji Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea Search for other works by this author on: Oxford Academic Google Scholar Jacob Choe, Jacob Choe Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea Search for other works by this author on: Oxford Academic Google Scholar Seungmin Shin, Seungmin Shin Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea Search for other works by this author on: Oxford Academic Google Scholar Geun-Taek Lee, Geun-Taek Lee Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea Search for other works by this author on: Oxford Academic Google Scholar Tae-Hong Kim, Tae-Hong Kim Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea Search for other works by this author on: Oxford Academic Google Scholar Jong Min Yuk Jong Min Yuk Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea Corresponding author: jongmin.yuk@kaist.ac.kr Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 126–127, https://doi.org/10.1017/S1431927622001404 Published: 01 August 2022