Nanometrology

Abstract Nanometrology can be defined as the science of measurement at the nanoscale level. Nanometrological measurements include not only length or size (shape, aspect ratio, and size distribution) but also chemical composition, nanoparticle concentrations, and optical, force, mass, electrical, and various other types of properties. This article highlights the importance of nanometrology, with special emphasis on size distribution measurements. Nanoparticles are classified and the role of standards is examined. Finally, selected nanometrological methods are discussed in terms of benefits and shortcomings.