AEM investigation of electromigration in aluminum test junctions

Model aluminum contact junctions which have been operated at high current density are examined for evidence of electromigration. Specimens are examined at the surface and cross-sections following metallographic sample preparation techniques. The analytical electron microscope (AEM) is used to locate the physical and/or chemical indicators of electromigration as reported in the literature. Indications of current induced electromigration are evident in both the AC and DC test groups.