栅栏
绝缘体上的硅
光学
材料科学
薄脆饼
衍射光栅
蚀刻(微加工)
极化(电化学)
物理
光电子学
硅
物理化学
复合材料
化学
图层(电子)
作者
Jinghui Zou,Yu Yu,Xinliang Zhang
出处
期刊:Optics Letters
[Optica Publishing Group]
日期:2016-09-06
卷期号:41 (18): 4206-4206
被引量:47
摘要
We design and demonstrate a two-dimensional grating coupler (2D GC) with a low polarization dependent loss (PDL) based on the silicon-on-insulator (SOI) platform. Using a grating cell consisting of five cylinders and carefully optimizing the distances between the cylinders, a maximum PDL of 0.25 dB covering the C-band is realized, which is 1.25 dB better than a conventional 2D GC with a single cylinder etching pattern fabricated on the same SOI wafer.
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