心轴
制作
旋转(数学)
机电一体化
材料科学
微观结构
机械工程
微电子机械系统
过程(计算)
光子学
纳米技术
计算机科学
工程类
光电子学
人工智能
复合材料
医学
替代医学
病理
操作系统
作者
Tieshan Zhang,Hao Ren,Gen Li,Panbing Wang,Wanfeng Shang,Shen Yajing
出处
期刊:IEEE-ASME Transactions on Mechatronics
[Institute of Electrical and Electronics Engineers]
日期:2024-02-01
卷期号:29 (1): 214-223
标识
DOI:10.1109/tmech.2023.3272956
摘要
Metallic helical microstructures are significant components applied in many fields, such as mechatronics, photonics, microelectromechanical systems, and biomedical engineering, but their fabrication with high precision remains a challenge. Herein, we report a general controllable approach for high-precise micro metallic helical structure fabrication by a self-developed rotational nanorobotic manipulation system. To reduce the fabrication error induced from the tilted mandrel, first, we propose an end-effector trajectory planning method to precompensate the tilted angle during rotation. Further, a hybrid vision and position feedback strategy is also developed to automate the fabrication process for obtaining a helical structure with uniform pitch distance consequently. The experimental results verify that our method is able to fabricate various micro helical structures with different dimensions with high precision up to 6 $\bm {\mu }$ m (less than two pixel equivalent). The potential application of the helical structure as high-precise force sensor is also demonstrated for soft biomaterial (hemostatic sponges) characterization. This research paves an effective solution for the high-precise 3-D helical structure fabrication, which would prompt their applications in engineering and inspire other microstructure manufacturing as well.
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