Analysis on performances of ultra-thin vertical MOSFET depending on position of gate–drain misalignment

Abstract In advanced MOSFET design, a vertical-channel structure provides the advantages of a smaller footprint of the transistor cell and stronger immunity against short-channel effects by introducing higher freedom in determining the channel length. For these reasons, vertical devices are still predicted to be an upcoming solution in the most recent technology roadmap. However, due to the cell-to-cell or wafer-to-wafer processing deviation that inevitably exists, it can be quite challenging to locate the gate edges at the exact positions that maximize the device performance. In this work, a series of technology computer-aided design (TCAD) device simulations have been carried out to investigate the effects of gate underlap and overlap structures on the device performance of vertical-channel MOSFETs. The device characterizations were conducted from the aspects of both DC and HF operations for higher completeness of this work, since both are not usually optimized at the same time under the same structural and processing conditions. Under the underlap condition, slight degradation in the on-state current ( I on ) drivability was observed. On the other hand, a noticeable off-state current ( I off ) increase was witnessed under the underlap conduction. It is explicitly demonstrated that excessive gate underlap results in non-ideal effects, including degradation of the subthreshold swing ( S ), worsening of drain-induced barrier lowering, and lowering of the maximum transconductance ( g m,Max ). In the HF analyses, although f T and f max remained high under overlap and gate–drain alignment conditions, it was observed that both were likely to deteriorate under underlap conditions. As a result, a processing margin in the anisotropic etching of the gate can be obtained for the optimization of the DC and HF performance of vertical-channel MOSFETs, paving the way for a wide variety of low-power and high-speed analog and digital applications.