氧烷
杂质
退火(玻璃)
材料科学
X射线吸收光谱法
掺杂剂
亚稳态
宽禁带半导体
带隙
电子结构
钝化
吸收光谱法
结晶学
光谱学
化学
光电子学
兴奋剂
纳米技术
物理
计算化学
光学
有机化学
量子力学
复合材料
图层(电子)
作者
Huayang Huang,Xiaolan Yan,Xuelin Yang,Wensheng Yan,Zeming Qi,Shan Wu,Zhaohua Shen,Ning Tang,Fujun Xu,Xinqiang Wang,Weikun Ge,Bing Huang,Bo Shen
摘要
Identifying atomic configurations of impurities in semiconductors is of fundamental interest and practical importance in designing electronic and optoelectronic devices. C impurity acting as one of the most common impurities in GaN, it is believed for a long time that it substitutes at Ga site forming CGa with +1 charge-state in p-type GaN, while it substitutes at N site forming CN with -1 charge-state in n-type GaN. However, by combining x-ray absorption spectroscopy and first-principles simulations, we observed that C is mainly occupying the N site rather than the Ga one in p-GaN. We further reveal that this is due to an H-induced EF-tuning effect. During growth, the existing H can passivate Mg dopants and upshifts the EF to the upper region of bandgap, leading to the CN formation. After the p-type activation by annealing out H, although the EF is pushed back close to the valence band maximum, whereas the extremely large kinetic barrier can prevent the migration of C from the metastable CN site to ground-state CGa site, hence stabilizing the CN configuration. Additionally, the CN with neutral charge-state (CN0) in the p-GaN is further observed. Therefore, the real C-related hole-killer in p-type GaN could be CN rather than the commonly expected CGa. Our work not only offers the unambiguous evidence for the C defect formation in p-GaN but also contributes significantly to an in-depth understanding of the C-related hole-killers and their critical role on electrical and optoelectrical properties of p-GaN and even p-AlGaN.
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